Metal gate MOS transistors and methods for making the same

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Title:	Metal gate MOS transistors and methods for making the same
Date:	2005
Citation:	Visokay, M. R., Colombo, L., & Chambers, J. J. (2005). Metal gate MOS transistors and methods for making the same. U.S. Patent No. 6,936,508. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1325



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