Metal gate MOS transistors and methods for making the same
Title: | Metal gate MOS transistors and methods for making the same |
Date: | 2005 |
Citation: | Visokay, M. R., Colombo, L., & Chambers, J. J. (2005). Metal gate MOS transistors and methods for making the same. U.S. Patent No. 6,936,508. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1325 |
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