Refractory metal-based electrodes for work function setting in semiconductor devices

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Title: Refractory metal-based electrodes for work function setting in semiconductor devices
Date: 2006
Citation: Rotondaro, A. L., Chambers, J. J., & Jain, A. (2006). Refractory metal-based electrodes for work function setting in semiconductor devices. U.S. Patent No. 7,098,516. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1331


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