MIM capacitor with metal nitride electrode materials and method of formation

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Title: MIM capacitor with metal nitride electrode materials and method of formation
Date: 2004
Citation: Basceri, C., & Graettinger, T. M. (2004). MIM capacitor with metal nitride electrode materials and method of formation. U.S. Patent No. 6,753,618. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1382


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