Atomic layer deposition methods

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Title: Atomic layer deposition methods
Date: 2004
Citation: Sarigiannis, D., Derderian, G. J., Basceri, C., Sandhu, G. S., Gealy, F. D., & Carlson, C. M. (2004). Atomic layer deposition methods. U.S. Patent No. 6,753,271. Washington, DC: U.S. Patent and Trademark Office.

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