Atomic layer deposition methods

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Title: Atomic layer deposition methods
Date: 2004
Citation: Marsh, E., Vaartstra, B., Castrovillo, P. J., Basceri, C., Derderian, G. J., & Sandhu, G. S. (2004). Atomic layer deposition methods. U.S. Patent No. 6,673,701. Washington, DC: U.S. Patent and Trademark Office.

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