Methods of depositing a layer comprising tungsten and methods of forming a transistor gate line
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2003
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Basceri, C., Derderian, G. J., Visokay, M. R., Drynan, J. M., & Sandhu, G. S. (2003). Methods of depositing a layer comprising tungsten and methods of forming a transistor gate line. U.S. Patent No. 6,617,250. Washington, DC: U.S. Patent and Trademark Office.