Method for fabricating transistor gate structures and gate dielectrics thereof

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Title: Method for fabricating transistor gate structures and gate dielectrics thereof
Date: 2006
Citation: Visokay, M. R., Colombo, L., Chambers, J. J., Rotondaro, A. L., & Bu, H. (2006). Method for fabricating transistor gate structures and gate dielectrics thereof. U.S. Patent No. 7,135,361. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1399


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