Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication

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Title: Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication
Date: 2007
Citation: Quevedo-Lopez, M., Chambers, J. J., & Olsen, L. C. (2007). Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication. U.S. Patent No. 7,199,021. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1401


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