Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication
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2007
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Quevedo-Lopez, M., Chambers, J. J., & Olsen, L. C. (2007). Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication. U.S. Patent No. 7,199,021. Washington, DC: U.S. Patent and Trademark Office.
