Refractory metal-based electrodes for work function setting in semiconductor devices

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Title: Refractory metal-based electrodes for work function setting in semiconductor devices
Date: 2008
Citation: Colombo, L., Chambers, J. J., & Visokay, M. R. (2008). Refractory metal-based electrodes for work function setting in semiconductor devices. U.S. Patent No. 7,321,154. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1402


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