Refractory metal capped low resistivity metal conductor lines and vias

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Title: Refractory metal capped low resistivity metal conductor lines and vias
Date: 1999
Citation: Joshi, R. V., Cuomo, J. J., Dalal, H. M., & Hsu, L. L. (1999). Refractory metal capped low resistivity metal conductor lines and vias. U.S. Patent No. 5,889,328. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1407


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