Method for polishing a diamond or carbon nitride film by reaction with oxygen transported to the film through a superionic conductor in contact with the film
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1998
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Cuomo, J. J., & Yehoda, J. E. (1998). Method for polishing a diamond or carbon nitride film by reaction with oxygen transported to the film through a superionic conductor in contact with the film. U.S. Patent No. 5,795,653. Washington, DC: U.S. Patent and Trademark Office.
