Radio frequency induction plasma processing system utilizing a uniform field coil

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Title: Radio frequency induction plasma processing system utilizing a uniform field coil
Date: 1994
Citation: Cuomo, J. J., Guarnieri, C. R., Hopwood, J. A., & Whitehair, S. J. (1994). Radio frequency induction plasma processing system utilizing a uniform field coil. U.S. Patent No. 5,280,154. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1421


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