Method of forming a non-conformal layer over and exposing a trench

Show full item record

Title: Method of forming a non-conformal layer over and exposing a trench
Date: 2003
Citation: Chopra, D., Donohoe, K. G., & Basceri, C. (2003). Method of forming a non-conformal layer over and exposing a trench. U.S. Patent No. 6,511,912. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1426


Files in this item

Files Size Format View
US_6511912_B1_I.pdf 106.0Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record