Method of etching a substantially amorphous TA2O5 comprising layer

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2003

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Basceri, C., Derderian, G. J., Visokay, M. R., Drynan, J. M., & Sandhu, G. S. (2003). Method of etching a substantially amorphous TA2O5 comprising layer. U.S. Patent No. 6,511,896. Washington, DC: U.S. Patent and Trademark Office.

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