Dielectric films and methods of forming same

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Title: Dielectric films and methods of forming same
Date: 2002
Citation: Basceri, C., & Gealy, D. (2002). Dielectric films and methods of forming same. U.S. Patent No. 6,444,478. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1432


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