Method for controlling deposition of dielectric films

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Title:	Method for controlling deposition of dielectric films
Date:	2003
Citation:	Basceri, C., Gealy, D., & Sandhu, G. S. (2003). Method for controlling deposition of dielectric films. U.S. Patent No. 6,566,147. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1442



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