Method for controlling deposition of dielectric films

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Title: Method for controlling deposition of dielectric films
Date: 2003
Citation: Basceri, C., Gealy, D., & Sandhu, G. S. (2003). Method for controlling deposition of dielectric films. U.S. Patent No. 6,566,147. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1442


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