Method for controlling deposition of dielectric films

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dc.date.accessioned 2008-10-14T17:24:51Z
dc.date.available 2008-10-14T17:24:51Z
dc.date.issued 2003
dc.identifier.citation Basceri, C., Gealy, D., & Sandhu, G. S. (2003). Method for controlling deposition of dielectric films. U.S. Patent No. 6,566,147. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1442
dc.format.extent 131424 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Method for controlling deposition of dielectric films
dc.type Patent


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