Method of providing a structure using self-aligned features

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Title: Method of providing a structure using self-aligned features
Date: 2004
Citation: Chopra, D., Donohoe, K. G., & Basceri, C. (2004). Method of providing a structure using self-aligned features. U.S. Patent No. 6,759,330. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1445


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