Self-aligned silicon carbide LMOSFET

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Title: Self-aligned silicon carbide LMOSFET
Date: 2001
Citation: Alok, D. (2001). Self-aligned silicon carbide LMOSFET. U.S. Patent No. 6,323,506. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1449


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