Measurement of thin films by polarized light

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Title:	Measurement of thin films by polarized light
Date:	1976
Citation:	Aspnes, D. E. (1976). Measurement of thin films by polarized light. U.S. Patent No. 3,985,447. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1459



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