Energetic particle beam deposition system

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Title: Energetic particle beam deposition system
Date: 1981
Citation: Cuomo, J. J., Gambino, R. J., Harper, J. M., & Kuptis, J. D. (1981). Energetic particle beam deposition system. U.S. Patent No. 4,250,009. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1475


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