Sub-100A range line width pattern fabrication

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Title: Sub-100A range line width pattern fabrication
Date: 1982
Citation: Broers, A. N., Cuomo, J. J., Laibowitz, R. B., & Moltzen, W. W. (1982). Sub-100A range line width pattern fabrication. U.S. Patent No. 4,316,093. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1478


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