Low energy ion beam oxidation process

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US_4351712_A_I.pdf (135.51 KB)

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1982

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Cuomo, J. J., & Harper, J. M. (1982). Low energy ion beam oxidation process. U.S. Patent No. 4,351,712. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1481

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