Low energy ion beam oxidation process

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Title: Low energy ion beam oxidation process
Date: 1982
Citation: Cuomo, J. J., & Harper, J. M. (1982). Low energy ion beam oxidation process. U.S. Patent No. 4,351,712. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1481


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