Negative ion beam selective etching process
Title: | Negative ion beam selective etching process |
Date: | 1983 |
Citation: | Cuomo, J. J. (1983). Negative ion beam selective etching process. U.S. Patent No. 4,414,069. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1488 |
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