Negative ion beam selective etching process

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Title:	Negative ion beam selective etching process
Date:	1983
Citation:	Cuomo, J. J. (1983). Negative ion beam selective etching process. U.S. Patent No. 4,414,069. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1488



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