Programmable ion beam patterning system

No Thumbnail Available

Date

1985

Authors

Advisors

Journal Title

Series/Report No.

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Citation

Cuomo, J. J., Harper, J. M., Kafuman, H. R., & Speidell, J. L. (1985). Programmable ion beam patterning system. U.S. Patent No. 4,523,971. Washington, DC: U.S. Patent and Trademark Office.

Degree

Discipline

Collections