Programmable ion beam patterning system

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Title: Programmable ion beam patterning system
Date: 1985
Citation: Cuomo, J. J., Harper, J. M., Kafuman, H. R., & Speidell, J. L. (1985). Programmable ion beam patterning system. U.S. Patent No. 4,523,971. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1496


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