Single grid focussed ion beam source

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US_4538067_A_I.pdf (91.66 KB)

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1985

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Cuomo, J. J., Harper, J. M., & Waters, G. A. (1985). Single grid focussed ion beam source. U.S. Patent No. 4,538,067. Washington, DC: U.S. Patent and Trademark Office.

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http://www.lib.ncsu.edu/resolver/1840.2/1498

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