Hollow cathode enhanced magnetron sputter device
No Thumbnail Available
Date
1986
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Cuomo, J. J., Kafuman, H. R., & Rossnagel, S. M. (1986). Hollow cathode enhanced magnetron sputter device. U.S. Patent No. 4,588,490. Washington, DC: U.S. Patent and Trademark Office.
