Hollow cathode enhanced magnetron sputter device

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Title: Hollow cathode enhanced magnetron sputter device
Date: 1986
Citation: Cuomo, J. J., Kafuman, H. R., & Rossnagel, S. M. (1986). Hollow cathode enhanced magnetron sputter device. U.S. Patent No. 4,588,490. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1502


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