Solid state microwave powered material and plasma processing systems

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Title: Solid state microwave powered material and plasma processing systems
Date: 1993
Citation: Cuomo, J. J., Guarnieri, C. R., & Whitehair, S. (1993). Solid state microwave powered material and plasma processing systems. U.S. Patent No. 5,179,264. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1510


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