Thin film transistor with large grain size DRW offset region and small grain size source and drain and channel regions

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Title: Thin film transistor with large grain size DRW offset region and small grain size source and drain and channel regions
Date: 1996
Citation: Batra, S., Manning, M., Banerjee, S., & Damiano, J. (1996). Thin film transistor with large grain size DRW offset region and small grain size source and drain and channel regions. U.S. Patent No. 5,548,132. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1521


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