Thin film transistor with large grain size DRW offset region and small grain size source and drain and channel regions

Thin film transistor with large grain size DRW offset region and small grain size source and drain and channel regions

Files

Date

1996

Citation

Batra, S., Manning, M., Banerjee, S., & Damiano, J. (1996). Thin film transistor with large grain size DRW offset region and small grain size source and drain and channel regions. U.S. Patent No. 5,548,132. Washington, DC: U.S. Patent and Trademark Office.