Positive tone lithography with carbon dioxide development systems

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Title: Positive tone lithography with carbon dioxide development systems
Date: 2005
Citation: DeSimone, J. M. (2005). Positive tone lithography with carbon dioxide development systems. U.S. Patent No. 6,929,904. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1535


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