Method and apparatus for cleaning substrates using liquid carbon dioxide

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Title: Method and apparatus for cleaning substrates using liquid carbon dioxide
Date: 2004
Citation: DeSimone, J. M., DeYoung, J. P., & McClain, J. B. (2004). Method and apparatus for cleaning substrates using liquid carbon dioxide. U.S. Patent No. 6,763,840. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1538


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