Methods for cleaning microelectronic structures with aqueous carbon dioxide systems

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Title: Methods for cleaning microelectronic structures with aqueous carbon dioxide systems
Date: 2003
Citation: DeYoung, J. P., McClain, J. B., Gross, S. M., & Simone, J. M. (2003). Methods for cleaning microelectronic structures with aqueous carbon dioxide systems. U.S. Patent No. 6,641,678. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1540


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