Methods, apparatus and slurries for chemical mechanical planarization

Show full item record

Title: Methods, apparatus and slurries for chemical mechanical planarization
Date: 2003
Citation: McClain, J. B., & DeSimone, J. M. (2003). Methods, apparatus and slurries for chemical mechanical planarization. U.S. Patent No. 6,623,355. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1541


Files in this item

Files Size Format View
US_6623355_B2_I.pdf 132.3Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record