Sputter deposition for multi-component thin films
Title: | Sputter deposition for multi-component thin films |
Date: | 1990 |
Citation: | Krauss, A. R., & Auciello, O. (1990). Sputter deposition for multi-component thin films. U.S. Patent No. 4,923,585. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1575 |
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