Sputter deposition for multi-component thin films

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Title:	Sputter deposition for multi-component thin films
Date:	1990
Citation:	Krauss, A. R., & Auciello, O. (1990). Sputter deposition for multi-component thin films. U.S. Patent No. 4,923,585. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1575



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