Sputter deposition for multi-component thin films

Show simple item record

dc.date.accessioned 2008-10-15T22:25:58Z
dc.date.available 2008-10-15T22:25:58Z
dc.date.issued 1990
dc.identifier.citation Krauss, A. R., & Auciello, O. (1990). Sputter deposition for multi-component thin films. U.S. Patent No. 4,923,585. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1575
dc.format.extent 143821 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Sputter deposition for multi-component thin films
dc.type Patent


Files in this item

Files Size Format View
US_4923585_A_I.pdf 140.4Kb PDF View/Open

This item appears in the following Collection(s)

Show simple item record