Ellipsometric control of material growth

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Title:	Ellipsometric control of material growth
Date:	1992
Citation:	Aspnes, D. E., & Quinn, D. E. (1992). Ellipsometric control of material growth. U.S. Patent No. 5,091,320. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1582



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