Ellipsometric control of material growth
Title: | Ellipsometric control of material growth |
Date: | 1992 |
Citation: | Aspnes, D. E., & Quinn, D. E. (1992). Ellipsometric control of material growth. U.S. Patent No. 5,091,320. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1582 |
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