Ellipsometric control of material growth

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dc.date.accessioned 2008-10-15T22:31:52Z
dc.date.available 2008-10-15T22:31:52Z
dc.date.issued 1992
dc.identifier.citation Aspnes, D. E., & Quinn, D. E. (1992). Ellipsometric control of material growth. U.S. Patent No. 5,091,320. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1582
dc.format.extent 159297 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Ellipsometric control of material growth
dc.type Patent


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