Extraction of spatially varying dielectric function from ellipsometric data
Title: | Extraction of spatially varying dielectric function from ellipsometric data |
Date: | 1994 |
Citation: | Aspnes, D. E. (1994). Extraction of spatially varying dielectric function from ellipsometric data. U.S. Patent No. 5,277,747. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1590 |
Files in this item
Files | Size | Format | View |
---|---|---|---|
US_5277747_A_I.pdf | 133.4Kb |
View/ |