Extraction of spatially varying dielectric function from ellipsometric data

Show full item record

Title:	Extraction of spatially varying dielectric function from ellipsometric data
Date:	1994
Citation:	Aspnes, D. E. (1994). Extraction of spatially varying dielectric function from ellipsometric data. U.S. Patent No. 5,277,747. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1590



Files in this item

Files	Size	Format	View
US_5277747_A_I.pdf	133.4Kb	PDF	View/Open

This item appears in the following Collection(s)

• Scholarly Publications
  

Show full item record