Extraction of spatially varying dielectric function from ellipsometric data

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Title: Extraction of spatially varying dielectric function from ellipsometric data
Date: 1994
Citation: Aspnes, D. E. (1994). Extraction of spatially varying dielectric function from ellipsometric data. U.S. Patent No. 5,277,747. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1590


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