Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films
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1997
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Varshney, U., & Kingon, A. I. (1997). Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films. U.S. Patent No. 5,626,670. Washington, DC: U.S. Patent and Trademark Office.
