Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films

Show simple item record

dc.date.accessioned 2008-10-15T23:16:07Z
dc.date.available 2008-10-15T23:16:07Z
dc.date.issued 1997
dc.identifier.citation Varshney, U., & Kingon, A. I. (1997). Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films. U.S. Patent No. 5,626,670. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1618
dc.format.extent 172301 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films
dc.type Patent


Files in this item

Files Size Format View
US_5626670_A_I.pdf 168.2Kb PDF View/Open

This item appears in the following Collection(s)

Show simple item record