Thin film optical measurement system and method with calibrating ellipsometer

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Title: Thin film optical measurement system and method with calibrating ellipsometer
Date: 1998
Citation: Aspnes, D. E., Opsal, J., & Faton, J. T. (1998). Thin film optical measurement system and method with calibrating ellipsometer. U.S. Patent No. 5,798,837. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1630


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