Broadband spectroscopic rotating compensator ellipsometer
No Thumbnail Available
Date
2000
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Aspnes, D. E., & Opsal, J. (2000). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 6,134,012. Washington, DC: U.S. Patent and Trademark Office.
