Ellipsometer and polarimeter with zero-order plate compensator

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Title: Ellipsometer and polarimeter with zero-order plate compensator
Date: 2001
Citation: Aspnes, D. E., & Law, J. Y. (2001). Ellipsometer and polarimeter with zero-order plate compensator. U.S. Patent No. 6,181,421. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1661


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