Thin film optical measurement system and method with calibrating ellipsometer
No Thumbnail Available
Date
2001
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Aspnes, D. E., Opsal, J., & Faton, J. T. (2001). Thin film optical measurement system and method with calibrating ellipsometer. U.S. Patent No. 6,304,326. Washington, DC: U.S. Patent and Trademark Office.