Thin film optical measurement system and method with calibrating ellipsometer

Show full item record

Title: Thin film optical measurement system and method with calibrating ellipsometer
Date: 2001
Citation: Aspnes, D. E., Opsal, J., & Faton, J. T. (2001). Thin film optical measurement system and method with calibrating ellipsometer. U.S. Patent No. 6,304,326. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1662


Files in this item

Files Size Format View
US_6304326_B1_I.pdf 158.6Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record