Thin film optical measurement system and method with calibrating ellipsometer

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Title: Thin film optical measurement system and method with calibrating ellipsometer
Date: 2002
Citation: Aspnes, D. E., Opsal, J., & Faton, J. T. (2002). Thin film optical measurement system and method with calibrating ellipsometer. U.S. Patent No. 6,411,385. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1676


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