Gallium nitride material devices and methods including backside vias

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Title: Gallium nitride material devices and methods including backside vias
Date: 2003
Citation: Weeks, T. W., Piner, E. L., Borges, R. M., & Linthicum, K. J. (2003). Gallium nitride material devices and methods including backside vias. U.S. Patent No. 6,611,002. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1683


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