Gallium nitride material devices and methods including backside vias

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dc.date.accessioned 2008-10-16T17:23:14Z
dc.date.available 2008-10-16T17:23:14Z
dc.date.issued 2003
dc.identifier.citation Weeks, T. W., Piner, E. L., Borges, R. M., & Linthicum, K. J. (2003). Gallium nitride material devices and methods including backside vias. U.S. Patent No. 6,611,002. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1683
dc.format.extent 148169 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Gallium nitride material devices and methods including backside vias
dc.type Patent


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