Broadband spectroscopic rotating compensator ellipsometer

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Title:	Broadband spectroscopic rotating compensator ellipsometer
Date:	2003
Citation:	Aspnes, D. E., & Opsal, J. (2003). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 6,650,415. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1691



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