Broadband spectroscopic rotating compensator ellipsometer

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Title: Broadband spectroscopic rotating compensator ellipsometer
Date: 2003
Citation: Aspnes, D. E., & Opsal, J. (2003). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 6,650,415. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1691


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