Integration of monocrystalline oxide devices with fully depleted CMOS on non-silicon substrates

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2003

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Croswell, R., & Dunn, G. (2003). Integration of monocrystalline oxide devices with fully depleted CMOS on non-silicon substrates. U.S. Patent No. 6,638,872. Washington, DC: U.S. Patent and Trademark Office.

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