Integration of monocrystalline oxide devices with fully depleted CMOS on non-silicon substrates

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Title: Integration of monocrystalline oxide devices with fully depleted CMOS on non-silicon substrates
Date: 2003
Citation: Croswell, R., & Dunn, G. (2003). Integration of monocrystalline oxide devices with fully depleted CMOS on non-silicon substrates. U.S. Patent No. 6,638,872. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1695


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